发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To form a crossover or connection between two points on a substrate in a semiconductor device having semiconductor elements such as MOS or the like by performing the steps of forming a transistor. CONSTITUTION:A hole is opened at the field insulating layer on an Si substrate. Impurity ions are implanted thereon with a photoresist 7 as a mask to form a diffused layer 9. An SiO2 film 8 is formed by a gate oxidation. A polysilicon layer 2 is grown, and is etched to form an upper layer wire. When a diffused layer 3 is formed by source and drain diffusions, the layers 3 are conducted with the diffused layer 9 conducted previously, thereby forming a depletion type transistor structure with the layer 2 as a gate. Thus, a crossover structure can be formed.
申请公布号 JPS57106150(A) 申请公布日期 1982.07.01
申请号 JP19800183462 申请日期 1980.12.24
申请人 FUJITSU KK 发明人 SHIRAI KAZUNARI;TANAKA IZUMI
分类号 H01L23/52;H01L21/3205;(IPC1-7):01L21/88 主分类号 H01L23/52
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