| 摘要 |
PURPOSE: To obtain a magneto-optical disk having excellent antistatic characteristic, hardness and scratch resistance force by forming a conductive layer of metal oxide on the second surface of a substrate. CONSTITUTION: The non-coated polycarbonate substrate 22 is fixed to a substrate holder 62 by directing its second light incident surface onto a magnetron sputtering source 44. A target contg. 5wt.% SnO2 and 95wt.% In2 O3 is installed on the source 44. A chamber 42 is evacuated to 5×10<-3> Torr, and Are 54 is introduced therein at 30 SCCM, O2 50 are introduced at 2SCCM therein, 5×10<-3> Torr is maintained once more again, and the holder 62 is rotated at 600rpm, process by which indium oxide tin 24 of a prescribed thickness (10 to 1000A) is formed on the second surface of the substrate. The sheet resistivity of this conductive layer is as small as 200Ω/cm<2> , and the layer exhibits Rockwell hardness M of 105. In addition, the conductive layer exhibits excellent antistatic characteristic. Thereafter, the optical recording medium is completed by laminating a recording layer 26, a reflection layer 30 and a transparent conductive layer 32 in the prescribed method and order. |
