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发明名称
MICROWAVE PLASMA PROCESSOR
摘要
申请公布号
JPH05206071(A)
申请公布日期
1993.08.13
申请号
JP19920034154
申请日期
1992.01.24
申请人
ANELVA CORP
发明人
MASHIRO SUPIKA
分类号
C23C14/40;C30B25/08;H01L21/302;H01L21/3065;H01L21/31;H05H1/18
主分类号
C23C14/40
代理机构
代理人
主权项
地址
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