METHOD FOR SRUCTURING OF LAYER,申请号JP19920306400-传众专利搜索

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发明名称	METHOD FOR SRUCTURING OF LAYER
摘要
申请公布号	JPH05206073(A)	申请公布日期	1993.08.13
申请号	JP19920306400	申请日期	1992.10.19
申请人	SIEMENS AG	发明人	MANFUREETO ENGERUHARUTO
分类号	H01L21/28;H01J37/32;H01L21/302;H01L21/3065;H01L21/3213	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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