| 摘要 |
PURPOSE:To form a corrosion-resisting thin film, having excellent adhesive property and corrosion-proof property, on the surface of permanent magnet material in uniform thickness by a method wherein a corrosion-proof thin film layer is formed on the surface of a permanent magnet body, having the main face consisting of tetragonal crystal, by a plasma vapor deposition thin film forming method. CONSTITUTION:The fine powder, in the composition of Nd 15, Dy 1.5 and Fe 75.5atom%, is placed in a metal mold, oriented in a magnetic field, molded, and the obtained molded body is heat-treated, and a permanent magnet is formed. A test piece is cut out from the obtained permanent magnet, SiH4 gas and N2O gas are fed to the vacuum container containing the test piece, electricity is discharged using high frequency plasma, and a Sin, thin film is formed. As a result, a corrosion-proof thin film layer, having the prescribed film thickness of excellent uniformity, can be obtained, and the oxidation of the permanent magnet can completely be prevented. |
