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发明名称
BURIED CONTACT FORMATION METHOD
摘要
申请公布号
JPH05206066(A)
申请公布日期
1993.08.13
申请号
JP19920011315
申请日期
1992.01.24
申请人
SONY CORP
发明人
TSUCHIYA YOSHIKO
分类号
H01L21/28;H01L21/302;H01L21/3065;H01L21/316;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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