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发明名称
OPTICAL MACHINING DEVICE
摘要
申请公布号
JPH05206558(A)
申请公布日期
1993.08.13
申请号
JP19920316043
申请日期
1992.10.31
申请人
SEMICONDUCTOR ENERGY LAB CO LTD
发明人
YAMAZAKI SHUNPEI;MASE AKIRA;SAKAYORI HIROYUKI
分类号
H01L21/302;H01L31/04;H01S3/00;H01S3/10
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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