A method of manufacturing a device employing a substrate of a material that exhibits the pyroelectric effect.

摘要

A waveguide electrooptic device is manufactured from a substrate (2) of a material, e.g. LiNb03, that exhibits the pyrolelectric effect by depositing a film (20) containing a selected material, e.g. Ti, in a first low resistivity state over a front surface of the substrate. At least one electrode (24) is formed on the film, portions (28) of the film being exposed around the electrode. The exposed portions (28) of the film are subjects to a treatment such that they are converted from the first low resistivity state to a second high resistivity state, in which the material has a resistivity that lies within a desired range of values. <IMAGE>