An electron cyclotron resonance ion source for an ion implanter. The source includes an ionization chamber surrounded along its length by an electromagnet. A number of extraction electrodes at an output end of the ionization chamber allow positively charged oxygen ions to pass through apertures in the electrodes. The uniformity of the axially aligned magnetic field in the ionization chamber is extended through the extraction electrode by a magnetically permeable electrode and through use of nonmagnetically permeable material to mount others of said electrodes.
申请公布号
CA1321229(C)
申请公布日期
1993.08.10
申请号
CA19890601416
申请日期
1989.06.01
申请人
NIPPON TELEGRAPH AND TELEPHONE CORPORATION;EATON CORPORATION
发明人
TORII, YASUHIRO;SHIMADA, MASARU;WATANABE, IWAO;HIPPLE, JAMES G.;DIONNE, GERRY