发明名称 Method of producing a high voltage MOS transistor
摘要 A high voltage MOS transistor includes a semiconductor substrate (1) of a first semiconductor type, a gate electrode (14) formed on the semiconductor substrate via a gate oxide layer (13), first and second diffusion regions (15, 16) formed in the semiconductor substrate on both sides of the gate electrode and being of a second semiconductor type opposite to the first semiconductor type, and an electrode (38) which is directly connected to the first diffusion region (15) and is made up of a conductor layer (49) including polysilicon. An impurity concentration of the conductor layer (49) including the polysilicon is higher than an impurity concentration of the first diffusion region (15).
申请公布号 US5234853(A) 申请公布日期 1993.08.10
申请号 US19920889625 申请日期 1992.05.28
申请人 FUJITSU LIMITED 发明人 IKEMASU, SHINICHIROU
分类号 H01L21/285;H01L21/336;H01L29/417;H01L29/45;H01L29/78 主分类号 H01L21/285
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