| 摘要 |
PURPOSE:To obtain method and device for taking out oxygen of ultra-high purity by which a little amount of oxygen of ultra-high purity is obtained from oxygen-rich air which is exhausted as exhaust gas by a device for manufacturing nitrogen of ultra-high purity. CONSTITUTION:Part of liquefied oxygen-rich air led out of a bottom part of a refining tower 1 of a device for manufacturing nitrogen is led into a first auxiliary refining tower 11 for refinement, and component of high boiling point is condensed at the bottom part of the first auxiliary refining tower 11 and exhausted through a tube 16. On the other hand, gas separated at a top part of the first auxiliary refining tower 11 is liquefied by an auxiliary condenser 12, and then, led into a second refining tower 13 for refinement. Component of low boiling point is condensed at a top part of the second auxiliary refining tower 13, and then, the gas is exhausted through another tube 27. At the same time, oxygen of ultra-high purity separated at a bottom part of the second auxiliary refining tower 13 is taken out through the tubes 16 and 26.
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