Rotary lock for transferring a substrate from one treatment- chamber to a neighbouring one.

摘要

The invention relates to a rotary lock for introducing or discharging a substrate from one treatment chamber to an adjacent one or from the atmospheric space to a chamber having a lower pressure, especially to a slit lock for a continuous vacuum deposition plant having a flap-like valve plate (2) retained in fixed bearings (11, 11a) and two closing motors (10, 10a) in effective connection with said valve plate. In this arrangement, the valve plate (2) is hinged, with the interposition of two resilient rods (5, 5a), on a valve beam (1) which in turn has two diametrically opposite journals (12, 12a) which are coupled in a torsion-proof manner with the shafts (18, 18a) of the motors (10, 10a), the shafts (18, 18a) of the motors (10, 10a) being run through the wall (13, 13a) of the chamber (3) in a pressure-proof manner.