| 摘要 |
PURPOSE:To increase the sensitivity of an electrochemical gas sensor while maintaining the miniaturization of the sensor. CONSTITUTION:An electrochemical gas sensor comprises plural electrodes 20, 30, 40 on an insulation substrate 10, and solid electrolyte film 50 covering these electrodes and filling between the electrodes. A surface part 70 including an interface 60 of the insulation substrate has pores 80 communicating with each other, and solid electrolyte 90 is filled inside each pore 80. |
