| 摘要 |
PURPOSE:To detect failures in various shapes which are generated in a band-shaped body highly accurately by calculating the width, the position of center of gravity, the number of crests, etc., of a reflection light distribution from a signal which each element of a group of light-reception elements receiving a reflection beam received. CONSTITUTION:A laser beam 3 which is generated by a laser device 2 is reflected by a polygon mirror 5 and a parabolic surface mirror 6, becomes a scanning beam 7 which performs a balanced scanning in the direction X of plate thickness, and then goes into the surface of a band-shaped body (steel plate) 1 at a certain angle. The beam 7 which is reflected by an irradiation point 8 is folded back by a parabolic surface mirror 9, is focused in X direction, and then goes into a group of light-reception elements (CCD image pick-up elements) 10. The reflection spot corresponds to the inclination in width direction X and running direction Y of the steel plate 1 at the irradiation point 8 and deviates from the center point on the light-reception surface of the elements 10. The width, the number of crests, position of center of gravity, etc., are calculated from the reflection light distribution on the light-reception surface of the elements 10 corresponding to the shape failure of the steel plate 1 and these values are converted to shape failure attribute values by a neural circuit net, thus enabling the shape failure to be evaluated and judged. |
