Multiple-frequency acoustic wave devices for chemical sensing and materials characterization in both gas and liquid phase

摘要

A chemical sensor (1) includes two or more pairs of interdigital electrodes (10) having different periodicities. Each pair is comprised of a first electrode (10a) and a second electrode (10b). The electrodes are patterned on a surface of a piezoelectric substrate (12). Each pair of electrodes may launch and receive various acoustic waves (AW), including a surface acoustic wave (SAW), and may also launch and receive several acoustic plate modes (APMs). The frequencies associated with each are functions of the transducer periodicity as well as the velocity of the particular AW in the chosen substrate material. An AW interaction region (13) exists between each pair of electrodes. Circuitry (20, 40) is used to launch, receive, and monitor the propagation characteristics of the AWs and may be configured in an intermittent measurement fashion or in a continuous measurement fashion. Perturbations to the AW velocity and attenuation are recorded at several frequencies and provide the sensor response.