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发明名称
STM-FIM-MBE COMPOSITE DEVICE
摘要
申请公布号
JPH05203406(A)
申请公布日期
1993.08.10
申请号
JP19920032803
申请日期
1992.01.24
申请人
SONY CORP
发明人
MIWA SHIRO;HAGA YASUHIKO
分类号
G01B7/34;G01Q30/02;G01Q30/18;G01Q60/10;H01J37/28;H01L21/203
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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