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经营范围
发明名称
SPUTTERING APPARATUS
摘要
申请公布号
JPH05202468(A)
申请公布日期
1993.08.10
申请号
JP19920012259
申请日期
1992.01.27
申请人
SUMITOMO ELECTRIC IND LTD
发明人
YAMADA TORU
分类号
H01L21/203;C23C14/34
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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