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发明名称
CHARGED PARTICLE BEAM EXPOSURE METHOD AND DEVICE
摘要
申请公布号
JPH05198487(A)
申请公布日期
1993.08.06
申请号
JP19920209067
申请日期
1992.08.05
申请人
FUJITSU LTD;FUJITSU VLSI LTD
发明人
KAI JUNICHI;YASUDA HIROSHI;NAKANO MITSUHIRO
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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