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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05198522(A)
申请公布日期
1993.08.06
申请号
JP19920031326
申请日期
1992.01.23
申请人
CANON INC
发明人
KOIZUMI TORU
分类号
H01L21/265;H01L27/10
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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