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发明名称
SINGLE WAFER EPITAXIAL GROWTH DEVICE
摘要
申请公布号
JPH05198514(A)
申请公布日期
1993.08.06
申请号
JP19920007828
申请日期
1992.01.20
申请人
TOSHIBA CORP
发明人
HOSHI TADAHIDE
分类号
H01L21/205;H01L21/677;H01L21/68;H01L21/683
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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