发明名称 SILICIDE INTERCONNECTION STRUCTURE BY SCHOTTKY-BARRIER-DIODE SEPARATION
摘要 PURPOSE: To provide interconnection of hetrogenously doped diffusion regions so formed on a substrate, comprising an interconnection layer, assigned between two diffusion regions that two diffusion regions are interconnected. CONSTITUTION: An interconnection 132 is formed with a mask interface where an N+-dopant and P+-dopant regions 114a, 114b, 112a, and 112b are present so that no N+ and P+-dopand infiltrate into an interconnection region, thereby without additional masking and etching step, the interconnection region is formed. Once the interconnection region is formed, an interconnection layer is formed in coating and baking processes. The interconnection layer provides a Schottky barrier and an ohmic contact.
申请公布号 JPH05198764(A) 申请公布日期 1993.08.06
申请号 JP19920189296 申请日期 1992.07.16
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 EDOWAADO JIYOZEFU NOWAKU
分类号 H01L21/8238;H01L27/092 主分类号 H01L21/8238
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