IMPROVED METHOD FOR FORMING SILICIDE ONTO POLYSILICON,申请号JP19920224491-传众专利搜索

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发明名称	IMPROVED METHOD FOR FORMING SILICIDE ONTO POLYSILICON
摘要
申请公布号	JPH05198592(A)	申请公布日期	1993.08.06
申请号	JP19920224491	申请日期	1992.08.25
申请人	AMERICAN TELEPH & TELEGR CO <ATT>	发明人	SAREE CHITSUTEIPETSUDEI;PURADEITSUPU KUMAA ROI;ANKINIIDEYU BUERAGA
分类号	H01L29/78;H01L21/28;H01L21/336	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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