MANUFACTURE OF SOFT MAGNETIC FERRITE THIN-FILM

摘要

PURPOSE:To provide a method for manufacturing a soft magnetic ferrite thin- film having a superior film quality and a relatively superior magnetic property at a lower temperature as compared with a conventional thermal CVD method. CONSTITUTION:A soft magnetic ferrite thin-film possessing magnetic properties equivalent to a bulk is manufactured on a substrate 2 at a relatively low temperature by bringing a mixed gas containing both vapor of beta-diketone-based metal complex introduced into a reaction chamber 1 from the inside of an evaporator 5 by means of a carrier gas 7 and a reactive gas introduced into another reaction chamber 1 to come into contact with a heated substrate 2 so that the mixed gas can be thermally decomposed.