| 摘要 |
PURPOSE:To obtain the optical coupling circuit which easily and optically couples semiconductor elements mounted on a substrate and optical waveguides by mounting and fixing the semiconductor elements onto a supporting base formed on the substrate with high efficiency and the method fixing the semiconductor optical elements maintaining the high efficiency coupling and having high reliability onto the substrate. CONSTITUTION:Si is used for the substrate 1 and a semiconductor light source and semiconductor detector which are the semiconductor optical elements 11 are optically connected to the optical waveguides 2 respectively consisting of quartz materials. The optical waveguides 2 and the semiconductor optical elements 11, such as semiconductor light sources and semiconductor detectors, and integrated on the substrate 1. The semiconductor optical elements 11, such as semiconductor light sources and semiconductor detectors, are mounted and fixed onto the supporting base 8. The supporting base 8 is formed at such a height at which the optical axes of the height direction of the optical waveguides 2 and the semiconductor optical elements 11 is aligned. Then, the optical axes in the height direction are aligned simply by mounting the semiconductor optical elements 11 on the supporting base 8. The high-efficiency coupling is easily obtd. simply by adjusting the optical axis in the intra-plane direction of the substrate 1. |
