| 摘要 |
The invention relates to a device making it possible to produce a light pulse train with high average power, used for obtaining intense X-ray radiation. It is composed of a laser oscillator (1) producing short pulses, a regenerator amplifier (2) injected the radiation coming from the oscillator (1) and which produces a controlled-intensity pulse sequence. These pulses are amplified in an amplifier (3) then, after passing through a harmonic-frequency generator (4), focused on a target (6) to produce, by laser-matter interaction, radiation in the high-power X-ray range. The device of the invention is particularly intended for X-ray microlithography. <IMAGE>
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