| 摘要 |
PURPOSE:To provide a controller for carrier carrying wafers, masks, or the like between semiconductor device fabricating machines by means of a linear induction motor in which response of servo system is enhanced, restriction range is widened, and reliability is enhanced. CONSTITUTION:A position detecting section B detects a position close to a target stop position of a carrier A fixed with a permanent magnet H. A control section C generates a control signal for stopping the carrier A at a target stop position. A driver section D feeds a driving current through a coil switching section G to one or two coils constituting a coil section E and imparts brake force onto the carrier A through mutual function with the field of the permanent magnet H. A coil selection signal generating section F detects positional information and moving speed of the carrier A based on a signal received from the position detecting section B and generates a corresponding coil selection signal thus selecting one or two coils in the coil section E. |
