发明名称 FORMATION OF TRANSPARENT FILM PATTERN ON BOTH SURFACES OF TRANSPARENT PANEL
摘要 PURPOSE:To form transparent film patterns such as transparent electrode film or transparent wiring film or the like through accurate position matching on both front and rear surfaces of a transparent panel such as glass material with extremely simplified process at a low cost. CONSTITUTION:Transparent thin films 11, 12 are formed on both front and rear surfaces of a transparent panel 3. Next, photoresist films 13, 14 are formed on both transparent thin films 11, 12. Thereafter, the one photoresist film 13 of both photoresist films 13, 14 is exposed through a mask 15. Next, after both photoresist films 13, 14 are developed, the etching is carried out for the entire part.
申请公布号 JPH05198472(A) 申请公布日期 1993.08.06
申请号 JP19920008496 申请日期 1992.01.21
申请人 ROHM CO LTD 发明人 MASAKI KAZUAKI
分类号 G02F1/1333;G02F1/13;G03F7/20;H01L21/027 主分类号 G02F1/1333
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