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发明名称
CLEANING EQUIPMENT
摘要
申请公布号
JPH05198544(A)
申请公布日期
1993.08.06
申请号
JP19920009777
申请日期
1992.01.23
申请人
HITACHI LTD
发明人
SATO TOMOHIRO;TAKIZAWA YOSHIHARU
分类号
B08B1/02;H01L21/304
主分类号
B08B1/02
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