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发明名称
HYBRID INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH05198719(A)
申请公布日期
1993.08.06
申请号
JP19920009074
申请日期
1992.01.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
KATO HAJIME
分类号
C23C2/08;C23C2/10;H01L23/50;H05K3/34
主分类号
C23C2/08
代理机构
代理人
主权项
地址
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