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发明名称
摘要
申请公布号
JPH0552445(B2)
申请公布日期
1993.08.05
申请号
JP19840173415
申请日期
1984.08.22
申请人
CHINOO KK;HITACHI SEISAKUSHO KK
发明人
HISHIKARI ISAO;KOBARI TETSUO;AMADA HARUO
分类号
G01J5/00;H01L21/205;H01L21/22;H01L21/31;H01L21/66;H05B7/18;(IPC1-7):G01J5/00
主分类号
G01J5/00
代理机构
代理人
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