摘要 |
PCT No. PCT/EP87/00258 Sec. 371 Date Feb. 18, 1988 Sec. 102(e) Date Feb. 18, 1988 PCT Filed May 15, 1987 PCT Pub. No. WO87/06864 PCT Pub. Date Nov. 19, 1987.An apparatus for manual wire bonding, comprising an ultrasonically energizable and/or thermocompression wedge (11) for pressing the wire (34) against a bonding pad, wherein the wedge (11) is part of a bonding head (10) adapted to be moved towards and away from said bonding pad, especially in up/down direction. The bonding pad is disposed on a base which is movable in a direction approximately transversely to the direction of movement of the bonding head (10) for positioning the bonding pad opposite said wedge (11). Furthermore, means is provided for controlling the drive unit (20) of the bonding head. Preferably, the drive unit (20) for the bonding head motion is a d.c. servomotor, wherein each part-motion and non-motion of the bonding head (10) can be adjusted individually in respect of travelling distance and speed and motionless period, respectively, and can be checked as to execution. To this end the drive unit (20) cooperates with a distance and speed control (44-51) and feedback (28) unit. |