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发明名称
A SCRUBBER APPARATUS FOR CLEANING A THIN DISK WORK
摘要
申请公布号
EP0549377(A3)
申请公布日期
1993.08.04
申请号
EP19920311839
申请日期
1992.12.29
申请人
SHIN-ETSU HANDOTAI COMPANY LIMITED
发明人
HASEGAWA, FUMIHIKO;TSUKADA, MAKOTO;KUDO, HIDEO;YAMADA, MASAYUKI;UCHIYAMA, ISAO, 10 AZA-SHIMO-NISHITAIRA
分类号
H01L21/304;B08B1/04;H01L21/00;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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