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发明名称
METHOD OF FORMING AN IMPROVED POLY-BUFFERED LOCOS PROCESS
摘要
申请公布号
EP0547908(A3)
申请公布日期
1993.08.04
申请号
EP19920311559
申请日期
1992.12.17
申请人
SGS-THOMSON MICROELECTRONICS, INC.
发明人
WEI, CHE-CHIA;HODGES, ROBERT LOUIS;BRYANT, FRANK RANDOLPH
分类号
H01L21/76;H01L21/316;H01L21/32;H01L21/762;(IPC1-7):H01L21/31
主分类号
H01L21/76
代理机构
代理人
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