发明名称 SEMICONDUCTOR ACCELERATION DETECTING APPARATUS
摘要 The fixed end of an acceleration detection beam of a semiconductor acceleration detecting apparatus is mounted onto a board through a supporting base. A weight for increasing the sensitivity to acceleration is disposed on the free end of the acceleration detection beam. A limit stop for limiting excessive displacement of the weight in two directions surrounds part of the weight. Therefore, the displacement of the weight can be controlled with a high degree of accuracy. Resistance to impact is also improved.
申请公布号 US5231879(A) 申请公布日期 1993.08.03
申请号 US19920846009 申请日期 1992.03.04
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 YAMAMOTO, MASAHIRO
分类号 G01P15/12;H01L29/84 主分类号 G01P15/12
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