CRYOGENIC PUMP AND SPUTTERING DEVICE USING THE PUMP,申请号JP19920006209-传众专利搜索

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发明名称	CRYOGENIC PUMP AND SPUTTERING DEVICE USING THE PUMP
摘要
申请公布号	JPH05195212(A)	申请公布日期	1993.08.03
申请号	JP19920006209	申请日期	1992.01.17
申请人	HITACHI LTD;HITACHI MICOM SYST:KK	发明人	MIYAMA YOSHIO;SASAKI HITOSHI;TANAKA HIROMASA
分类号	C23C14/34;H01L21/203	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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