发明名称 |
Resonant mirror and method of manufacture |
摘要 |
A resonant mirror is disclosed which comprises a deflectable mirror generally planar with the stop surface of a substrate. The mirror is suspended adjacent the top surface by at least two supporting elements. At least one supporting element is displaced from an edge of the mirror. The supporting elements, being collinear, define an axis of rotation about which the mirror may oscillate to steer incident light through an angle.
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申请公布号 |
US5233456(A) |
申请公布日期 |
1993.08.03 |
申请号 |
US19910811407 |
申请日期 |
1991.12.20 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
NELSON, WILLIAM E. |
分类号 |
G02B26/08;G02B26/10;H01S3/101 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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