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发明名称
FURNACE STRUCTURE OF SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
US5232506(A)
申请公布日期
1993.08.03
申请号
US19920818075
申请日期
1992.01.08
申请人
NEC CORPORATION
发明人
KAWASE, YASUYOSHI
分类号
H01L21/205;C30B35/00;F27B9/02;F27B17/00;F27D19/00;H01L21/00;H01L21/22;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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