| 摘要 |
PURPOSE:To provide a one-side lapping/polishing device which is capable of stably polishing works under optimum machining conditions and readily manufac turing very smooth planes, so that it has high product yields and is excellent in reliability and productivity. CONSTITUTION:A one-side lapping/polishing device comprises abrasive grains which are constantly supplied, a surface plate 1 which causes the abrasive grains to remain on the surface to be machined of a work 2 so as to polish the work, a surface plate driving system for rotating the surface plate 1, a work holder portion B for fixing the work 2 and for pressing the surface to be machined of the work 2 into contact with the surface plate 1, and a work holder portion driving system for directly rotating the work holder portion B. |
