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发明名称
APPARATUS FOR PULLING UP SEMICONDUCTOR SINGLE CRYSTAL
摘要
申请公布号
JPH05194076(A)
申请公布日期
1993.08.03
申请号
JP19920029874
申请日期
1992.01.22
申请人
KOMATSU DENSHI KINZOKU KK
发明人
SASE KAZUHIRO
分类号
C30B15/00;C30B15/14;H01L21/208
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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