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发明名称
VACUUM VESSEL
摘要
申请公布号
KR930007150(B1)
申请公布日期
1993.07.30
申请号
KR19910070622
申请日期
1991.06.18
申请人
VARIAN ASSOCIATES INC.
发明人
WEINBERG, RICHARD S.
分类号
C23C14/56;C23C16/00;H01L21/203;(IPC1-7):C23C16/00
主分类号
C23C14/56
代理机构
代理人
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地址
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