| 摘要 |
<p>PURPOSE:To correct even a substrate having a large warp and to surely suck and hold the substrate. CONSTITUTION:A suction part 2 is formed at the tip of a conveyance part. Suction ports 2a, 2b, 2c, 2d are formed in the suction part 2; the suction part 2 can be moved to a direction perpendicular to the suction face S of a substrate 5 by means of a drive part 201. The suction part 2 which ban be moved can come into contact with the substrate 5 even when the warp of the substrate 5 is large; in addition, it can be corrected so as to match the shape of the suction face S of the substrate 5. As a result, suction holes 4 can suck and hold the substrate 5 in sufficiently large areas.</p> |
