| 摘要 |
PURPOSE: To easily pattern a high Tc superconductor layer by patterning a precursor layer before the precursor is converted into a high Tc superconductor state. CONSTITUTION: Using, for example, nitrate which is a component going to exist in a final superconductive film, the nitrate is mixed at an appropriate stoichionietric ratio for preparing a solution of nitrate. The solution is sprayed to a substrate kept at a slightly higher temperature. After a solvent is evaporated from the substrate, non-irradiated part is left as nitrate state, and a laser beam is used to change the irradiated part of the sprayed layer into, thermally, an intermediate oxide state. After drawing with the laser beam is completed, a non-irradiated nitrate part of layer is removed while dissolved in an appropriate alcohol group solvent. A remaining oxide film is annealed at an appropriate temperature is an oxygen-contained environment, and cooled for completing a high Tc superconductor state. Thereby, without using a mask, direct drawing using energy line becomes possible for realizing patterning of arbitrary shape.
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