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发明名称
MICROSCOPIC PATTERN FORMING METHOD
摘要
申请公布号
JPH05190510(A)
申请公布日期
1993.07.30
申请号
JP19920006073
申请日期
1992.01.17
申请人
NIPPON STEEL CORP
发明人
SUZUKI YASUHIRO
分类号
H01L21/302;H01L21/027;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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