| 摘要 |
PURPOSE:To grow a semiconductor crystalline layer having a large area and to sufficiently enhance a strength of the layer in an apparatus for manufacturing a semiconductor layer for growing a semiconductor crystal to be used for an optical semiconductor device, a high speed semiconductor device, etc. CONSTITUTION:The apparatus for manufacturing a semiconductor layer comprises a growing boat base 1 having a recess 2 in which a substrate 8 formed with a seed is charged, and a growing boat 3 having a growing solution reservoir 4 formed with a linear opening 6 in a bottom and sliding on the base 1. |
