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经营范围
发明名称
PHOTO CVD APPARATUS
摘要
申请公布号
JPH05190473(A)
申请公布日期
1993.07.30
申请号
JP19920166709
申请日期
1992.06.03
申请人
SEMICONDUCTOR ENERGY LAB CO LTD
发明人
YAMAZAKI SHUNPEI;TASHIRO MAMORU;MIYAZAKI MINORU
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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