| 摘要 |
PURPOSE:To provide technique which enables element analysis and trace impurity analysis of an inside of a deep hollow and a groove formed in a sample surface. CONSTITUTION:A solid-state surface element analyzer wherein deflecting field is provided among irradiation system of a primary particle, a sample 3 and analysis system of a secondary particle and wherein the secondary particle 2 emitted when the primary particle 1 collides with an inside of a hollow of the sample 3 can be taken out of the hollow without coming into contact with the inside of the sample 3 again by making an irradiation direction of the primary particle 1 and an output direction of the secondary particle 2 the same or by making an opening angle of the both 45 deg. or less. |
