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经营范围
发明名称
WAFER TRANSFER DEVICE
摘要
申请公布号
JPH05190646(A)
申请公布日期
1993.07.30
申请号
JP19920002808
申请日期
1992.01.10
申请人
SHINKO ELECTRIC CO LTD
发明人
YAMASHITA TAKASHI
分类号
H01L21/677;H01L21/22;H01L21/68
主分类号
H01L21/677
代理机构
代理人
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