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发明名称
AUTOMATIC FOCUSING OF SCAN TYPE ELECTRON MICROSCOPE
摘要
申请公布号
JPH05190132(A)
申请公布日期
1993.07.30
申请号
JP19920004021
申请日期
1992.01.13
申请人
TOSHIBA CORP
发明人
KOMATSU BUNRO;KAGA YASUHIRO
分类号
H01J37/147;H01J37/21;H01J37/28
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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