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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05190685(A)
申请公布日期
1993.07.30
申请号
JP19920026264
申请日期
1992.01.17
申请人
NIPPON STEEL CORP
发明人
TANAKA MASAAKI
分类号
H01L21/285;H01L21/28;H01L21/3205;H01L21/768
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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