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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05190683(A)
申请公布日期
1993.07.30
申请号
JP19920004957
申请日期
1992.01.14
申请人
MIYAZAKI OKI ELECTRIC CO LTD;OKI ELECTRIC IND CO LTD
发明人
ICHIKI HIDEHIKO
分类号
H01L21/3205;H01L21/768
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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